Assignee
BROOKS INSTR LLC
US·12 granted patents·2 pending applications·206 citations·filing 2003–2012
Top patents by PatentIndex Score
14 records- 0196US7905139B2Mass flow controller with improved dynamicBROOKS INSTR LLC·Filed 2008·Granted Mar 15, 2011·33 cites·38 claims
- 0295US7636640B2Multi-gas flow deviceBROOKS INSTR LLC·Filed 2007·Granted Dec 22, 2009·32 cites·10 claims
- 0393US7874208B2System for and method of providing a wide-range flow controllerBROOKS INSTR LLC·Filed 2008·Granted Jan 25, 2011·30 cites·32 claims
- 0487US7680399B2System and method for producing and delivering vaporBROOKS INSTR LLC·Filed 2006·Granted Mar 16, 2010·23 cites·38 claims
- 0586US7991510B2Flow measurement and control with bubble detectionBROOKS INSTR LLC·Filed 2009·Granted Aug 2, 2011·21 cites·45 claims
- 0686US7748268B2Thermal flow meterBROOKS INSTR LLC·Filed 2008·Granted Jul 6, 2010·25 cites·38 claims
- 0774US7941284B1Systems, apparatuses, and methods for measuring a fluid characteristic using a coriolis flow meterBROOKS INSTR LLC·Filed 2009·Granted May 10, 2011·9 cites·42 claims
- 0873US7720617B2Flow sensor signal conversionBROOKS INSTR LLC·Filed 2007·Granted May 18, 2010·6 cites·31 claims
- 0973USD590734SMass flow controllerBROOKS INSTR LLC·Filed 2008·Granted Apr 21, 2009·10 cites·1 claims
- 1057USD584179SMass flow controllerBROOKS INSTR LLC·Filed 2008·Granted Jan 6, 2009·3 cites·1 claims
- 1156US7377152B2Method and device for determining a characteristic value that is representative of the condition of a gasBROOKS INSTR LLC·Filed 2003·Granted May 27, 2008·14 cites·38 claims
- 1248US2011191038A1Mass flow controller with improved dynamic responseBROOKS INSTR LLC·Filed 2011·Application pending·0 cites
- 1342US7720628B2Digitally controlled sensor systemBROOKS INSTR LLC·Filed 2005·Granted May 18, 2010·0 cites·21 claims
- 1433US2015292084A1Integrated multi-headed atomizer and vaporization system and methodBROOKS INSTR LLC·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when BROOKS INSTR LLC files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →