Assignee
BRINKHOF EUGENE MARIA
NL·2 granted patents·13 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0177US8502960B2Heat transfer assembly, lithographic apparatus and manufacturing methodBRINKHOF EUGENE MARIA·Filed 2010·Granted Aug 6, 2013·13 cites·21 claims
- 0237US9360771B2Electrostatic clamp, lithographic apparatus, and device manufacturing methodBRINKHOF EUGENE MARIA·Filed 2012·Granted Jun 7, 2016·0 cites·19 claims
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