Assignee
BRILL BOAZ
IL·4 granted patents·4 pending applications·24 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0193US8488128B2Line edge roughness measuring technique and test structureBRILL BOAZ·Filed 2009·Granted Jul 16, 2013·19 cites·14 claims
- 0275US10295329B2Monitoring system and method for verifying measurements in patterned structuresBRILL BOAZ·Filed 2012·Granted May 21, 2019·3 cites·21 claims
- 0360US8658982B2Optical method and system utilizing operating with deep or vacuum UV spectraBRILL BOAZ·Filed 2008·Granted Feb 25, 2014·2 cites·15 claims
- 0451US9568872B2Process control using non-zero order diffractionBRILL BOAZ·Filed 2012·Granted Feb 14, 2017·0 cites·10 claims
- 0551US2014079312A9Method and system for optimizing optical inspection of patterned structuresBRILL BOAZ·Filed 2011·Application pending·0 cites
- 0639US2010321679A1Measurement system and methodBRILL BOAZ·Filed 2008·Application pending·0 cites
- 0736US2013124141A1Method and system for measuring in patterned structuresBRILL BOAZ·Filed 2011·Application pending·0 cites
- 0836US2013282343A1Method and system for use in measuring in complex patterned structuresBRILL BOAZ·Filed 2012·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →