Assignee
BLUE29 LLC
US·10 granted patents·418 citations·filing 2002–2003
Top patents by PatentIndex Score
10 records- 0197US6881437B2Methods and system for processing a microelectronic topographyBLUE29 LLC·Filed 2003·Granted Apr 19, 2005·112 cites·14 claims
- 0293US6913651B2Apparatus and method for electroless deposition of materials on semiconductor substratesBLUE29 LLC·Filed 2002·Granted Jul 5, 2005·67 cites·15 claims
- 0392US6860944B2Microelectronic fabrication system components and method for processing a wafer using such componentsBLUE29 LLC·Filed 2003·Granted Mar 1, 2005·55 cites·17 claims
- 0488US6902605B2Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copperBLUE29 LLC·Filed 2003·Granted Jun 7, 2005·53 cites·34 claims
- 0586US6911067B2Solution composition and method for electroless deposition of coatings free of alkali metalsBLUE29 LLC·Filed 2003·Granted Jun 28, 2005·30 cites·43 claims
- 0684US7235483B2Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growthBLUE29 LLC·Filed 2002·Granted Jun 26, 2007·26 cites·19 claims
- 0784US6908512B2Temperature-controlled substrate holder for processing in fluidsBLUE29 LLC·Filed 2002·Granted Jun 21, 2005·34 cites·20 claims
- 0873US6935638B2Universal substrate holder for treating objects in fluidsBLUE29 LLC·Filed 2003·Granted Aug 30, 2005·18 cites·20 claims
- 0968US6846519B2Method and apparatus for electroless deposition with temperature-controlled chuckBLUE29 LLC·Filed 2002·Granted Jan 25, 2005·13 cites·19 claims
- 1067US6939403B2Spatially-arranged chemical processing stationBLUE29 LLC·Filed 2002·Granted Sep 6, 2005·10 cites·6 claims
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