Assignee
BETHEL MATERIAL RES
US·2 granted patents·49 citations·filing 1999–1999
Top patents by PatentIndex Score
2 records- 0160US6310577B1Plasma processing system with a new inductive antenna and hybrid coupling of electronagnetic powerBETHEL MATERIAL RES·Filed 1999·Granted Oct 30, 2001·39 cites·15 claims
- 0250US6447635B1Plasma processing system and system using wide area planar antennaBETHEL MATERIAL RES·Filed 1999·Granted Sep 10, 2002·10 cites·14 claims
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