Assignee
BENEQ OY
FI·42 granted patents·55 pending applications·21 citations·filing 2005–2023
Top patents by PatentIndex Score
97 records- 0189US10214813B2Apparatus and method for providing a coating to a surface of a substrateBENEQ OY·Filed 2016·Granted Feb 26, 2019·4 cites·18 claims
- 0285US9708710B2Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursorsBENEQ OY·Filed 2014·Granted Jul 18, 2017·3 cites·10 claims
- 0381US9226362B2Transparent inorganic thin-film electroluminescent display element and method for manufacturing itBENEQ OY·Filed 2013·Granted Dec 29, 2015·5 cites·13 claims
- 0479US9892814B2Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the sameBENEQ OY·Filed 2016·Granted Feb 13, 2018·1 cites·8 claims
- 0579US8367561B2Method in depositing metal oxide materialsBENEQ OY·Filed 2008·Granted Feb 5, 2013·3 cites·22 claims
- 0676US7922821B2Source, an arrangement for installing a source, and a method for installing and removing a sourceBENEQ OY·Filed 2006·Granted Apr 12, 2011·2 cites·18 claims
- 0775US10023957B2Apparatus and method for processing substrateBENEQ OY·Filed 2013·Granted Jul 17, 2018·1 cites·14 claims
- 0873US2019203356A1Arrangement for processing substrate and substrate carrierBENEQ OY·Filed 2019·Application pending·0 cites
- 0972US11926896B2Atomic layer deposition apparatusBENEQ OY·Filed 2023·Granted Mar 12, 2024·0 cites·12 claims
- 1070US11421319B2Plasma etch-resistant film and a method for its fabricationBENEQ OY·Filed 2020·Granted Aug 23, 2022·0 cites·9 claims
- 1169US12104248B2Gas feeding cup and a gas manifold assemblyBENEQ OY·Filed 2023·Granted Oct 1, 2024·0 cites·19 claims
- 1269US9683291B2Apparatus for processing surface of substrate and nozzle headBENEQ OY·Filed 2013·Granted Jun 20, 2017·1 cites·19 claims
- 1368US2017268106A1Arrangement for processing substrate and substrate carrierBENEQ OY·Filed 2017·Application pending·0 cites
- 1464US10961620B2Plasma etch-resistant film and a method for its fabricationBENEQ OY·Filed 2017·Granted Mar 30, 2021·0 cites·25 claims
- 1564US2018251896A1Apparatus for processing substrateBENEQ OY·Filed 2018·Application pending·0 cites
- 1661US12180587B2Vacuum chamber and arrangement for atomic layer depositionBENEQ OY·Filed 2023·Granted Dec 31, 2024·0 cites·19 claims
- 1761US10273579B2Apparatus for processing two or more substrates in a batch processBENEQ OY·Filed 2014·Granted Apr 30, 2019·1 cites·18 claims
- 1861US2017362708A1Apparatus and methodBENEQ OY·Filed 2017·Application pending·0 cites
- 1961US2014335272A1Protective coating of silverBENEQ OY·Filed 2014·Application pending·0 cites
- 2060US2024158914A1Method and use related to a film and a filmBENEQ OY·Filed 2022·Application pending·0 cites
- 2159US12180588B2Loading device, arrangement and method for loading a reaction chamberBENEQ OY·Filed 2023·Granted Dec 31, 2024·0 cites·13 claims
- 2258US2023374658A1An atomic layer deposition apparatusBENEQ OY·Filed 2021·Application pending·0 cites
- 2358US2021108138A1Materials comprising matrix material doped with metal and methods for fabricationBENEQ OY·Filed 2019·Application pending·0 cites
- 2456US12116668B2Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangementBENEQ OY·Filed 2023·Granted Oct 15, 2024·0 cites·10 claims
- 2556US2025369100A1A barrier deposit within a substrateBENEQ OY·Filed 2023·Application pending·0 cites
- 2655US2011003087A1Method and apparatus for generating plasmaBENEQ OY·Filed 2008·Application pending·0 cites
- 2755US2011014385A1Method and apparatus for coating an article using a spray-coating methodBENEQ OY·Filed 2009·Application pending·0 cites
- 2855US2021164100A1Apparatus and methodBENEQ OY·Filed 2019·Application pending·0 cites
- 2954US12442081B2Nozzle head and apparatusBENEQ OY·Filed 2019·Granted Oct 14, 2025·0 cites·10 claims
- 3054US2011041556A1Glass surface modification processBENEQ OY·Filed 2009·Application pending·0 cites
- 3154US2010285205A1Coating methodBENEQ OY·Filed 2008·Application pending·0 cites
- 3254US2010258652A1Device for forming aerosol, and method and apparatus for coating glassBENEQ OY·Filed 2008·Application pending·0 cites
- 3353US12000043B2Precursor source arrangement and atomic layer deposition apparatusBENEQ OY·Filed 2020·Granted Jun 4, 2024·0 cites·23 claims
- 3453US10590536B2Apparatus, method and reaction chamberBENEQ OY·Filed 2018·Granted Mar 17, 2020·0 cites·5 claims
- 3553US2009095021A1Hydrophobic glass surfaceBENEQ OY·Filed 2007·Application pending·0 cites
- 3652US11214866B2Nozzle head and apparatusBENEQ OY·Filed 2020·Granted Jan 4, 2022·0 cites·7 claims
- 3752US2010258650A1Device and method for producing aerosolBENEQ OY·Filed 2008·Application pending·0 cites
- 3852US2009255470A1Ald reactorBENEQ OY·Filed 2006·Application pending·0 cites
- 3951US11634814B2Atomic layer deposition apparatusBENEQ OY·Filed 2020·Granted Apr 25, 2023·0 cites·13 claims
- 4051US9726372B2Burner nozzle, burner and a surface treatment deviceBENEQ OY·Filed 2014·Granted Aug 8, 2017·0 cites·22 claims
- 4151US2010107693A1Method for doping glassBENEQ OY·Filed 2007·Application pending·0 cites
- 4250US11702745B2Nozzle and nozzle headBENEQ OY·Filed 2018·Granted Jul 18, 2023·0 cites·9 claims
- 4350US10111300B2Display device and a method for manufacturing such deviceBENEQ OY·Filed 2016·Granted Oct 23, 2018·0 cites·17 claims
- 4450US2013000726A1Thin film photovoltaic cell, a method for manufacturing, and useBENEQ OY·Filed 2010·Application pending·0 cites
- 4550US2021214847A1Nozzle headBENEQ OY·Filed 2018·Application pending·0 cites
- 4650US2015004318A1Nozzle and nozzle headBENEQ OY·Filed 2013·Application pending·0 cites
- 4750US2009078203A1Hot sourceBENEQ OY·Filed 2007·Application pending·0 cites
- 4850US2010264233A1Device and method for producing particlesBENEQ OY·Filed 2008·Application pending·0 cites
- 4949US11041243B2Coating precursor nozzle and a nozzle headBENEQ OY·Filed 2016·Granted Jun 22, 2021·0 cites·20 claims
- 5049US10513776B2Method for coating a substrateBENEQ OY·Filed 2017·Granted Dec 24, 2019·0 cites·17 claims
Showing the top 50 of 97 patent records by PatentIndex Score.
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