Assignee

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD

CN·30 granted patents·43 pending applications·7 citations·filing 2019–2025

Technology mixH10P56 H01J49 H01L48 F27B9 F27D7 G01J7

Top patents by PatentIndex Score

73 records

0192US11101142B2Pre-heat processes for millisecond anneal systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2020·Granted Aug 24, 2021·2 cites·11 claims
0291US11955388B2Transmission-based temperature measurement of a workpiece in a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Apr 9, 2024·1 cites·18 claims
0389US2025364218A1Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP) LoadsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
0488US12068177B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Aug 20, 2024·2 cites·11 claims
0586US12562342B2Variable mode plasma chamber utilizing tunable plasma potentialBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Feb 24, 2026·0 cites·20 claims
0686US2025372353A1Plasma Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
0785US12261073B2Electrostatic chuck assembly for plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Mar 25, 2025·0 cites·20 claims
0885US2025379073A1Workpiece Processing Apparatus with Thermal Processing SystemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
0984US11955315B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Apr 9, 2024·2 cites·20 claims
1084US2026015722A1Workpiece Processing Apparatus with Gas Showerhead AssemblyBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
1183US12347677B2Enhanced ignition in inductively coupled plasmas for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Jul 1, 2025·0 cites·15 claims
1281US12400916B2Transmission-based temperature measurement of a workpiece in a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Aug 26, 2025·0 cites·18 claims
1381US2025293007A1Configurable Faraday ShieldBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
1479US12412758B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Sep 9, 2025·0 cites·8 claims
1579US2025093852A1Control System For Adaptive Control Of A Thermal Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
1678US12174616B2Control system for adaptive control of a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·6 claims
1778US11848204B2Enhanced ignition in inductively coupled plasmas for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Dec 19, 2023·0 cites·7 claims
1877US12476151B2Preheat processes for millisecond anneal systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Nov 18, 2025·0 cites·14 claims
1977US12119254B2Electrostatic chuck assembly for plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
2076US12266503B2Hybrid plasma source arrayBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Apr 1, 2025·0 cites·21 claims
2176US2025293002A1Workpiece Processing Apparatus with Outer Gas Channel InsertBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
2276US2025201517A1Hybrid Plasma Source ArrayBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
2375US12119216B2Arc lamp with forming gas for thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·24 claims
2475US2023091035A1Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
2575US2025191958A1Electrostatic Chuck Assembly for Plasma Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
2675US2025014935A1Electrostatic chuck assembly for plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
2773US12417900B2Plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Sep 16, 2025·0 cites·19 claims
2873US2025314267A1Workpiece Support For A Thermal Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
2970US12183558B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·14 claims
3070US2024379390A1Rapid Thermal Processing System With Cooling SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
3169US12308209B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted May 20, 2025·0 cites·15 claims
3269US11923215B2Systems and methods for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·14 claims
3366US2024355634A1Method for processing workpiece, plasma processing apparatus and semiconductor deviceBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
3466US2023411125A1Temperature Control Using Temperature Control Element Coupled to Faraday ShieldBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Application pending·0 cites
3566US2026031309A1Methods and systems for coated components of a plasma processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
3666US2022223405A1Processing of Semiconductors Using Vaporized SolventsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
3765US2026074150A1Plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
3865US2026074159A1Plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
3965US2025218740A1Plasma Strip Tool With Movable InsertBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
4064US2021391185A1Surface Smoothing of WorkpiecesBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Application pending·0 cites
4164US2026092740A1Coatings for thermal processing apparatus and lamp heat sourcesBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
4264US2024404858A1Transfer Apparatus And Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
4364US2022165614A1Systems And Methods For Workpiece Processing Using Neutral Atom BeamsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
4463US2024404797A1Workpiece Processing Apparatus and Methods for the Treatment of WorkpiecesBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
4562US12283467B2Plasma strip tool with movable insertBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·18 claims
4661US2025218737A1Plasma source cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
4760US11107695B2Surface smoothing of workpiecesBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·11 claims
4860US2025112030A1Plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
4959US11837447B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
5059US11837493B2Electrostatic chuck assembly for plasma processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims

Showing the top 50 of 73 patent records by PatentIndex Score.

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