Assignee
AZ ELECTRONIC MATERIALS USA
US·79 granted patents·1 pending application·924 citations·filing 1999–2011
Top patents by PatentIndex Score
80 records- 0197US7678528B2Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Mar 16, 2010·34 cites·9 claims
- 0296US7824837B2Positive-working photoimageable bottom antireflective coatingAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Nov 2, 2010·54 cites·22 claims
- 0396US6991888B2Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2003·Granted Jan 31, 2006·84 cites·19 claims
- 0495US7745077B2Composition for coating over a photoresist patternAZ ELECTRONIC MATERIALS USA·Filed 2008·Granted Jun 29, 2010·31 cites·19 claims
- 0594US7691556B2Antireflective compositions for photoresistsAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Apr 6, 2010·29 cites·27 claims
- 0694US7521170B2Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Apr 21, 2009·21 cites·8 claims
- 0794US7416834B2Antireflective coating compositionsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Aug 26, 2008·19 cites·22 claims
- 0893US7595141B2Composition for coating over a photoresist patternAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Sep 29, 2009·46 cites·12 claims
- 0993US7473512B2Process of imaging a deep ultraviolet photoresist with a top coating and materials thereofAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Jan 6, 2009·18 cites·27 claims
- 1092US7638262B2Antireflective composition for photoresistsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Dec 29, 2009·19 cites·20 claims
- 1192US7553905B2Anti-reflective coatingsAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Jun 30, 2009·15 cites·4 claims
- 1292US7390613B1Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Jun 24, 2008·16 cites·20 claims
- 1391US7932018B2Antireflective coating compositionAZ ELECTRONIC MATERIALS USA·Filed 2008·Granted Apr 26, 2011·17 cites·18 claims
- 1491US7923200B2Composition for coating over a photoresist pattern comprising a lactamAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Apr 12, 2011·17 cites·16 claims
- 1591US7704670B2High silicon-content thin film thermosetsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Apr 27, 2010·10 cites·25 claims
- 1690US7601482B2Negative photoresist compositionsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Oct 13, 2009·16 cites·23 claims
- 1790US7470500B2Organic bottom antireflective polymer compositionsAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Dec 30, 2008·11 cites·15 claims
- 1889US7736837B2Antireflective coating composition based on silicon polymerAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Jun 15, 2010·15 cites·14 claims
- 1988US8039202B2Positive-working photoimageable bottom antireflective coatingAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Oct 18, 2011·11 cites·19 claims
- 2088US8039201B2Antireflective coating composition and process thereofAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Oct 18, 2011·11 cites·17 claims
- 2185US8017296B2Antireflective coating composition comprising fused aromatic ringsAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Sep 13, 2011·11 cites·25 claims
- 2285US7745093B2Water soluble resin composition and method for pattern formation using the sameAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Jun 29, 2010·14 cites·11 claims
- 2384US7358408B2Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2003·Granted Apr 15, 2008·14 cites·1 claims
- 2483US7989144B2Antireflective coating compositionAZ ELECTRONIC MATERIALS USA·Filed 2008·Granted Aug 2, 2011·9 cites·18 claims
- 2581US7816071B2Process of imaging a photoresist with multiple antireflective coatingsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Oct 19, 2010·19 cites·22 claims
- 2681US7081511B2Process for making polyestersAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Jul 25, 2006·21 cites·25 claims
- 2780US8026040B2Silicone coating compositionAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Sep 27, 2011·5 cites·13 claims
- 2880US7867559B2Photoresist coating liquid supplying apparatus, and photoresist coating liquid supplying method and photoresist coating apparatus using such photoresist coating liquid supplying apparatusAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Jan 11, 2011·8 cites·17 claims
- 2980US7399582B2Material for forming fine pattern and method for forming fine pattern using the sameAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Jul 15, 2008·19 cites·12 claims
- 3079US7344603B2Solvent for treating polysilazane and method of treating polysilazane with the solventAZ ELECTRONIC MATERIALS USA·Filed 2002·Granted Mar 18, 2008·19 cites·2 claims
- 3179US7045471B2Method for forming resist pattern in reverse-tapered shapeAZ ELECTRONIC MATERIALS USA·Filed 2001·Granted May 16, 2006·17 cites·4 claims
- 3276US7754414B2Antireflective coating compositionsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Jul 13, 2010·4 cites·4 claims
- 3375US7754003B2Coating composition and low dielectric siliceous material produced by using sameAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Jul 13, 2010·18 cites·5 claims
- 3475US7226726B2Aqueous surfactant solution for developing coating film layerAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Jun 5, 2007·11 cites·9 claims
- 3575US7030201B2Bottom antireflective coatingsAZ ELECTRONIC MATERIALS USA·Filed 2003·Granted Apr 18, 2006·7 cites·22 claims
- 3674US7141177B2Etching method and composition for forming etching protective layerAZ ELECTRONIC MATERIALS USA·Filed 2002·Granted Nov 28, 2006·17 cites·17 claims
- 3773US7998664B2Processing liquid for resist substrate and method of processing resist substrate using the sameAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Aug 16, 2011·4 cites·9 claims
- 3873US7629391B2Process for the preparation of aqueous suspensions of anionic colloidal silica having a neutral pH and applications thereofAZ ELECTRONIC MATERIALS USA·Filed 2002·Granted Dec 8, 2009·10 cites·8 claims
- 3973US7592132B2Method for fine pattern formationAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Sep 22, 2009·5 cites·11 claims
- 4072US7255970B2Photoresist composition for imaging thick filmsAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Aug 14, 2007·11 cites·17 claims
- 4171US7833693B2Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2008·Granted Nov 16, 2010·1 cites·10 claims
- 4271US7651719B2Process for the preparation of aqueous suspensions of anionic colloidal silica having a neutral pH and applications thereofAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Jan 26, 2010·0 cites·11 claims
- 4370US8026201B2Stripper for coating layerAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Sep 27, 2011·3 cites·24 claims
- 4468US7759046B2Antireflective coating compositionsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Jul 20, 2010·2 cites·11 claims
- 4568US7247419B2Nanocomposite photosensitive composition and use thereofAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Jul 24, 2007·2 cites·10 claims
- 4666US7547501B2Photoactive compoundsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Jun 16, 2009·1 cites·5 claims
- 4765US7598320B2Protected polyvinyl alcohol auxiliary for forming fine pattern and process for producing the sameAZ ELECTRONIC MATERIALS USA·Filed 2004·Granted Oct 6, 2009·7 cites·9 claims
- 4865US7070914B2Process for producing an image using a first minimum bottom antireflective coating compositionAZ ELECTRONIC MATERIALS USA·Filed 2002·Granted Jul 4, 2006·18 cites·25 claims
- 4964US7264913B2Antireflective compositions for photoresistsAZ ELECTRONIC MATERIALS USA·Filed 2002·Granted Sep 4, 2007·21 cites·31 claims
- 5064US7033728B2Photoresist compositionAZ ELECTRONIC MATERIALS USA·Filed 2003·Granted Apr 25, 2006·18 cites·26 claims
Showing the top 50 of 80 patent records by PatentIndex Score.
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