Assignee
AVIZA TECHNOLOGY LTD
GB·7 granted patents·3 pending applications·532 citations·filing 2002–2009
Top patents by PatentIndex Score
10 records- 0192US7205246B2Forming low k dielectric layersAVIZA TECHNOLOGY LTD·Filed 2002·Granted Apr 17, 2007·518 cites·43 claims
- 0267US7282158B2Method of processing a workpieceAVIZA TECHNOLOGY LTD·Filed 2005·Granted Oct 16, 2007·4 cites·12 claims
- 0360US7351669B2Method of forming a substantially closed voidAVIZA TECHNOLOGY LTD·Filed 2004·Granted Apr 1, 2008·9 cites·16 claims
- 0449US8354652B2Ion source including separate support systems for accelerator gridsAVIZA TECHNOLOGY LTD·Filed 2007·Granted Jan 15, 2013·0 cites·21 claims
- 0547US2008245770A1Positive Displacement Pumping ChamberAVIZA TECHNOLOGY LTD·Filed 2006·Application pending·0 cites
- 0647US2010068105A1Microfluidic structures and how to make themAVIZA TECHNOLOGY LTD·Filed 2006·Application pending·0 cites
- 0745US2009170343A1Method and apparatus for treating a semi-conductor substrateAVIZA TECHNOLOGY LTD·Filed 2009·Application pending·0 cites
- 0842US7403089B2Magnet assembliesAVIZA TECHNOLOGY LTD·Filed 2004·Granted Jul 22, 2008·1 cites·11 claims
- 0940US7732307B2Method of forming amorphous TiN by thermal chemical vapor deposition (CVD)AVIZA TECHNOLOGY LTD·Filed 2005·Granted Jun 8, 2010·0 cites·17 claims
- 1035US7202167B2Method of forming a diffusion barrierAVIZA TECHNOLOGY LTD·Filed 2004·Granted Apr 10, 2007·0 cites·20 claims
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