Assignee
AUROS TECHNOLOGY INC
KR·26 granted patents·11 pending applications·10 citations·filing 2019–2025
Top patents by PatentIndex Score
37 records- 0195US11781996B1Overlay measuring device and method for controlling focus and program thereforAUROS TECHNOLOGY INC·Filed 2023·Granted Oct 10, 2023·2 cites·17 claims
- 0293US11835865B2Overlay measurement apparatusAUROS TECHNOLOGY INC·Filed 2023·Granted Dec 5, 2023·5 cites·14 claims
- 0392US12105028B1Apparatus for generating model for spectroscopic ellipsometry constant analysis and method thereforAUROS TECHNOLOGY INC·Filed 2023·Granted Oct 1, 2024·1 cites·14 claims
- 0483US12482688B2Overlay measurement device and method, and system and program thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Nov 25, 2025·0 cites·11 claims
- 0583US12334382B2Overlay measurement device and method, and system and program thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Jun 17, 2025·0 cites·9 claims
- 0683US12235590B2Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Feb 25, 2025·0 cites·8 claims
- 0783US11847777B1Correlation-based overlay key centering system and method thereofAUROS TECHNOLOGY INC·Filed 2023·Granted Dec 19, 2023·1 cites·16 claims
- 0883US2026044088A1Image acquisition device, image acquisition method, and image acquisition device control programAUROS TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0982US12341047B2Overlay measurement device and method, and system and program thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Jun 24, 2025·0 cites·11 claims
- 1082US12169364B2Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Dec 17, 2024·0 cites·8 claims
- 1182US12169365B2Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Dec 17, 2024·0 cites·8 claims
- 1281US12009243B2Overlay measurement device and method, and system and program thereforAUROS TECHNOLOGY INC·Filed 2023·Granted Jun 11, 2024·0 cites·17 claims
- 1380US11960214B1Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device thereforAUROS TECHNOLOGY INC·Filed 2023·Granted Apr 16, 2024·0 cites·8 claims
- 1476US12085383B2Overlay measurement deviceAUROS TECHNOLOGY INC·Filed 2020·Granted Sep 10, 2024·1 cites·8 claims
- 1568US2026090464A1Alignment mark used in wafer bonding process and wafer bonding method using the sameAUROS TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 1667US12244926B2Overlay measurement device and method for controlling focus movement and program storage medium thereforAUROS TECHNOLOGY INC·Filed 2024·Granted Mar 4, 2025·0 cites·22 claims
- 1767US12010425B2Overlay measurement device and method for controlling focus movement and program storage medium thereforAUROS TECHNOLOGY INC·Filed 2023·Granted Jun 11, 2024·0 cites·22 claims
- 1865US2024329318A1Wavelength-tunable fiber optic light source and overlay measurement device with sameAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 1962US11971248B1Wavelength-tunable fiber optic light source and overlay measurement device with sameAUROS TECHNOLOGY INC·Filed 2023·Granted Apr 30, 2024·0 cites·13 claims
- 2061US2024160952A1Target-based shortest path extracting method and device thereofAUROS TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 2159US12483765B2Image acquisition method and deviceAUROS TECHNOLOGY INC·Filed 2023·Granted Nov 25, 2025·0 cites·18 claims
- 2258US12107052B2Overlay mark forming Moire pattern, overlay measurement method using same, overlay measurement apparatus using same, and manufacturing method of semiconductor device using sameAUROS TECHNOLOGY INC·Filed 2023·Granted Oct 1, 2024·0 cites·5 claims
- 2357US2024312847A1Optimization method of overlay measurement device and overlay measurement device performing the sameAUROS TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 2456US2024296547A1Overlay measurement apparatus and overlay measurement methodAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 2554US12591997B2Arrangement device and methodAUROS TECHNOLOGY INC·Filed 2023·Granted Mar 31, 2026·0 cites·15 claims
- 2654US2024265578A1Apparatus and method for performing pixel calibration with high accuracyAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 2753US12066331B2Polarization analysis apparatus and method for adjusting angle of incidence or numerical aperture using apertureAUROS TECHNOLOGY INC·Filed 2023·Granted Aug 20, 2024·0 cites·13 claims
- 2853US11874104B2Apparatus for transferring optical instrumentAUROS TECHNOLOGY INC·Filed 2022·Granted Jan 16, 2024·0 cites·24 claims
- 2952US12021040B2Overlay mark forming Moire pattern, overlay measurement method using same, and manufacturing method of semiconductor device using sameAUROS TECHNOLOGY INC·Filed 2023·Granted Jun 25, 2024·0 cites·12 claims
- 3051US11604421B1Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay markAUROS TECHNOLOGY INC·Filed 2022·Granted Mar 14, 2023·0 cites·11 claims
- 3150US11835447B1Method for measuring characteristic of thin filmAUROS TECHNOLOGY INC·Filed 2023·Granted Dec 5, 2023·0 cites·6 claims
- 3248US2024272560A1Overlay measurement apparatus and overlay measurement methodAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 3346US2023184546A1Apparatus and method for measuring overlayAUROS TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 3445US12002249B1Deep learning-based overlay key centering system and method thereofAUROS TECHNOLOGY INC·Filed 2023·Granted Jun 4, 2024·0 cites·17 claims
- 3543US2024410835A1Overlay measurement apparatus and overlay measurement methodAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 3641US2024310161A1Apparatus, system, and method for analyzing thin films with improved precisionAUROS TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 3739US12001146B2Overlay measurment deviceAUROS TECHNOLOGY INC·Filed 2019·Granted Jun 4, 2024·0 cites·5 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →