Assignee
ASML NETHERLANDS
NL·1 granted patent·1 pending application·15 citations·filing 2006–2008
Top patents by PatentIndex Score
2 records- 0189US7403293B2Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing methodASML NETHERLANDS·Filed 2006·Granted Jul 22, 2008·15 cites·32 claims
- 0242US2009086187A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS·Filed 2008·Application pending·0 cites
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