Assignee
ASAKO RYUICHI
JP·5 granted patents·10 citations·filing 2008–2011
Top patents by PatentIndex Score
5 records- 0172US8268721B2Semiconductor device and semiconductor device manufacturing methodASAKO RYUICHI·Filed 2011·Granted Sep 18, 2012·3 cites·11 claims
- 0271US8101507B2Semiconductor device manufacturing method and semiconductor device manufacturing apparatusASAKO RYUICHI·Filed 2009·Granted Jan 24, 2012·3 cites·5 claims
- 0368US8058153B2Method for recovering damage of low dielectric insulating film for manufacturing semiconductor deviceASAKO RYUICHI·Filed 2008·Granted Nov 15, 2011·3 cites·5 claims
- 0463US8614140B2Semiconductor device manufacturing apparatusASAKO RYUICHI·Filed 2011·Granted Dec 24, 2013·1 cites·4 claims
- 0546US8288252B2Method for recovering damaged components in lower region of low dielectric insulating filmASAKO RYUICHI·Filed 2011·Granted Oct 16, 2012·0 cites·9 claims
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