Assignee
APLEX INC
US·13 granted patents·615 citations·filing 1997–1998
Top patents by PatentIndex Score
13 records- 0194US6059643AApparatus and method for polishing a flat surface using a belted polishing padAPLEX INC·Filed 1997·Granted May 9, 2000·297 cites·35 claims
- 0290US6000997ATemperature regulation in a CMP processAPLEX INC·Filed 1998·Granted Dec 14, 1999·101 cites·32 claims
- 0376US5947802AWafer shuttle systemAPLEX INC·Filed 1997·Granted Sep 7, 1999·46 cites·10 claims
- 0468US6042457AConditioner assembly for a chemical mechanical polishing apparatusAPLEX INC·Filed 1998·Granted Mar 28, 2000·28 cites·27 claims
- 0564US6126512ARobust belt tracking and control system for hostile environmentAPLEX INC·Filed 1998·Granted Oct 3, 2000·30 cites·13 claims
- 0664US6126527ASeal for polishing belt center support having a single movable sealed cavityAPLEX INC·Filed 1998·Granted Oct 3, 2000·26 cites·28 claims
- 0762US5957764AModular wafer polishing apparatus and methodAPLEX INC·Filed 1997·Granted Sep 28, 1999·25 cites·23 claims
- 0861US6086456APolishing method using a hydrostatic fluid bearing support having fluctuating fluid flowAPLEX INC·Filed 1998·Granted Jul 11, 2000·19 cites·10 claims
- 0950US6149512ALinear pad conditioning apparatusAPLEX INC·Filed 1997·Granted Nov 21, 2000·16 cites·19 claims
- 1047US6159083APolishing head for a chemical mechanical polishing apparatusAPLEX INC·Filed 1998·Granted Dec 12, 2000·14 cites·31 claims
- 1143US6146249AApparatus and method for polishing a flat surface using a belted polishing padAPLEX INC·Filed 1998·Granted Nov 14, 2000·6 cites·14 claims
- 1233US6098901AApparatus for dispensing slurryAPLEX INC·Filed 1998·Granted Aug 8, 2000·5 cites·12 claims
- 1324US6062961AWafer polishing head driveAPLEX INC·Filed 1997·Granted May 16, 2000·2 cites·10 claims
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