Assignee
AKRION LLC
US·16 granted patents·236 citations·filing 2001–2004
Top patents by PatentIndex Score
16 records- 0185US6767877B2Method and system for chemical injection in silicon wafer processingAKRION LLC·Filed 2002·Granted Jul 27, 2004·67 cites·18 claims
- 0278US6837944B2Cleaning and drying method and apparatusAKRION LLC·Filed 2002·Granted Jan 4, 2005·24 cites·8 claims
- 0374US6840250B2Nextgen wet process tankAKRION LLC·Filed 2002·Granted Jan 11, 2005·23 cites·24 claims
- 0472US6626189B2Method of processing substrates using pressurized mist generationAKRION LLC·Filed 2002·Granted Sep 30, 2003·13 cites·14 claims
- 0571US6532974B2Process tank with pressurized mist generationAKRION LLC·Filed 2002·Granted Mar 18, 2003·13 cites·15 claims
- 0669US6732749B2Particle barrier drainAKRION LLC·Filed 2001·Granted May 11, 2004·12 cites·13 claims
- 0768US6766818B2Chemical concentration control deviceAKRION LLC·Filed 2002·Granted Jul 27, 2004·24 cites·23 claims
- 0865US6928750B2Membrane dryerAKRION LLC·Filed 2004·Granted Aug 16, 2005·10 cites·14 claims
- 0960US6842998B2Membrane dryerAKRION LLC·Filed 2002·Granted Jan 18, 2005·7 cites·15 claims
- 1059US6907890B2Capillary drying of substratesAKRION LLC·Filed 2003·Granted Jun 21, 2005·11 cites·21 claims
- 1159US6649018B2System for removal of photoresist using spargerAKRION LLC·Filed 2002·Granted Nov 18, 2003·4 cites·15 claims
- 1258US6955727B2Substrate process tank with acoustical source transmission and method of processing substratesAKRION LLC·Filed 2003·Granted Oct 18, 2005·10 cites·27 claims
- 1358US6871657B2Low profile wafer carrierAKRION LLC·Filed 2002·Granted Mar 29, 2005·9 cites·21 claims
- 1458US6818563B2Process and apparatus for removal of photoresist from semiconductor wafers using spray nozzlesAKRION LLC·Filed 2003·Granted Nov 16, 2004·4 cites·26 claims
- 1556US6863836B2Method for removal of photoresist using spargerAKRION LLC·Filed 2003·Granted Mar 8, 2005·3 cites·7 claims
- 1641US6722056B2Drying vapor generationAKRION LLC·Filed 2002·Granted Apr 20, 2004·2 cites·28 claims
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