Assignee
AKADA HIKARU
JP·2 granted patents·1 pending application·10 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0179US9268739B2Data acquisition method in substrate processing apparatus and sensor substrateAKADA HIKARU·Filed 2011·Granted Feb 23, 2016·10 cites·20 claims
- 0234US9915677B2Data acquisition method of substrate processing apparatus and sensing substrateAKADA HIKARU·Filed 2012·Granted Mar 13, 2018·0 cites·8 claims
- 0329US2012084059A1Data acquisition method of substrate treatment apparatus and sensor substrateAKADA HIKARU·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when AKADA HIKARU files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →