Assignee

AIHARA SENTARO

JP·1 granted patent·2 citations·filing 2011–2011

Technology mixB05D1 B29C1 B82Y1 G03F1

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0168US9651860B2Imprinting method and imprinting apparatus, sample shot extraction method, and article manufacturing method using sameAIHARA SENTARO·Filed 2011·Granted May 16, 2017·2 cites·8 claims

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