Assignee
AIGO SEIICHIRO
27 granted patents·1,109 citations·filing 1977–1991
Top patents by PatentIndex Score
27 records- 0198US4480223AUnitary probe assemblyAIGO SEIICHIRO·Filed 1981·Granted Oct 30, 1984·186 cites·8 claims
- 0298US4137867AApparatus for bump-plating semiconductor wafersAIGO SEIICHIRO·Filed 1977·Granted Feb 6, 1979·116 cites·15 claims
- 0396US4519846AProcess for washing and drying a semiconductor elementAIGO SEIICHIRO·Filed 1984·Granted May 28, 1985·151 cites·6 claims
- 0496US4339319AApparatus for plating semiconductor wafersAIGO SEIICHIRO·Filed 1980·Granted Jul 13, 1982·84 cites·5 claims
- 0594US4170959AApparatus for bump-plating semiconductor wafersAIGO SEIICHIRO·Filed 1978·Granted Oct 16, 1979·43 cites·3 claims
- 0692US4511796AInformation cardAIGO SEIICHIRO·Filed 1982·Granted Apr 16, 1985·103 cites·7 claims
- 0791US4339297AApparatus for etching of oxide film on semiconductor waferAIGO SEIICHIRO·Filed 1981·Granted Jul 13, 1982·49 cites·6 claims
- 0883US5014727ABubbler device for washing semiconductor materialsAIGO SEIICHIRO·Filed 1989·Granted May 14, 1991·62 cites·4 claims
- 0978US4447716AInformation cardAIGO SEIICHIRO·Filed 1982·Granted May 8, 1984·42 cites·10 claims
- 1074US4409471AInformation cardAIGO SEIICHIRO·Filed 1981·Granted Oct 11, 1983·36 cites·4 claims
- 1171US4600463ATreatment basin for semiconductor materialAIGO SEIICHIRO·Filed 1985·Granted Jul 15, 1986·17 cites·4 claims
- 1267US4361163AApparatus for washing semiconductor materialsAIGO SEIICHIRO·Filed 1981·Granted Nov 30, 1982·28 cites·5 claims
- 1366US5190064AApparatus for washing semiconductor materialsAIGO SEIICHIRO·Filed 1991·Granted Mar 2, 1993·38 cites·5 claims
- 1466US4677758ASpin drier for semiconductor materialAIGO SEIICHIRO·Filed 1985·Granted Jul 7, 1987·32 cites·8 claims
- 1558US4525938ASpin drier for semiconductor materialAIGO SEIICHIRO·Filed 1984·Granted Jul 2, 1985·13 cites·9 claims
- 1656US4500080ACarrier for cleaning and etching wafersAIGO SEIICHIRO·Filed 1982·Granted Feb 19, 1985·12 cites·5 claims
- 1751US4907349ASpin drier for semiconductor materialsAIGO SEIICHIRO·Filed 1988·Granted Mar 13, 1990·18 cites·8 claims
- 1850US4489501ASpin drier for silicon wafers and the likeAIGO SEIICHIRO·Filed 1982·Granted Dec 25, 1984·9 cites·6 claims
- 1942US4791880ADevice for developing treatment of semiconductor materialsAIGO SEIICHIRO·Filed 1987·Granted Dec 20, 1988·11 cites·5 claims
- 2042US4759817AApparatus for etching semiconductor materialAIGO SEIICHIRO·Filed 1986·Granted Jul 26, 1988·6 cites·6 claims
- 2142US4520934ACradle for semiconductor element carrierAIGO SEIICHIRO·Filed 1984·Granted Jun 4, 1985·10 cites·10 claims
- 2241US5050316AFilter-box for a spin dryerAIGO SEIICHIRO·Filed 1990·Granted Sep 24, 1991·12 cites·4 claims
- 2340US5083381AMethod and apparatus for drying semiconductor materialsAIGO SEIICHIRO·Filed 1991·Granted Jan 28, 1992·11 cites·6 claims
- 2439US4661653APackage assembly for semiconductor deviceAIGO SEIICHIRO·Filed 1984·Granted Apr 28, 1987·8 cites·6 claims
- 2534US4489502ASpin drier for silicon wafers and the likeAIGO SEIICHIRO·Filed 1982·Granted Dec 25, 1984·3 cites·4 claims
- 2633US5150532ALid member having a filter medium for a spin dryerAIGO SEIICHIRO·Filed 1991·Granted Sep 29, 1992·5 cites·3 claims
- 2732US5012935ASupport frame for supporting a semiconductor wafer carrierAIGO SEIICHIRO·Filed 1990·Granted May 7, 1991·4 cites·4 claims
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