Assignee
ACTINIC SYSTEMS INC
US·2 granted patents·20 citations·filing 1988–1996
Top patents by PatentIndex Score
2 records- 0147US4907029AUniform deep ultraviolet radiant source for sub micron resolution systemsACTINIC SYSTEMS INC·Filed 1988·Granted Mar 6, 1990·9 cites·20 claims
- 0240US5703374ATelecentric NUV-DUV irradiator for out-of-contact exposure of large substratesACTINIC SYSTEMS INC·Filed 1996·Granted Dec 30, 1997·11 cites·30 claims
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