Assignee
ACN CO LTD
KR·0 granted patents·2 pending applications·0 citations·filing 2016–2017
Top patents by PatentIndex Score
2 records- 0137US2018061615A1Plasma treatment apparatus having dual gas distribution baffle for uniform gas distributionACN CO LTD·Filed 2017·Application pending·0 cites
- 0233US2018308729A1Hybrid substrate processing system for dry and wet process and substrate processing method thereofACN CO LTD·Filed 2016·Application pending·0 cites
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