Assignee

ABBOTT KENNETH A

2 granted patents·5 citations·filing 2005–2011

Technology mixB03C2 B05D2 B81B2 B81C2 C23C2

Top patents by PatentIndex Score

2 records

0172US7927423B1Vapor deposition of anti-stiction layer for micromechanical devicesABBOTT KENNETH A·Filed 2005·Granted Apr 19, 2011·5 cites·3 claims
0247US9150959B2Vapor deposition of anti-stiction layer for micromechanical devicesABBOTT KENNETH A·Filed 2011·Granted Oct 6, 2015·0 cites·21 claims

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