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US6822326B2Nov 23, 2004

Wafer bonding hermetic encapsulation

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US6368930B1Apr 9, 2002

Self aligned symmetric process and device

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US7622324B2Nov 24, 2009

Wafer bonding hermetic encapsulation

ZIPTRONIX85 citations96
US6756281B2Jun 29, 2004

Self aligned symmetric intrinsic process and device

ZIPTRONIX34 citations95