Assignee
YAO TERUYOSHI
JP·2 granted patents·0 citations·filing 2010–2012
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0150US8553198B2Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposureYAO TERUYOSHI·Filed 2012·Granted Oct 8, 2013·0 cites·2 claims
- 0245US8227153B2Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposureYAO TERUYOSHI·Filed 2010·Granted Jul 24, 2012·0 cites·1 claims
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