Assignee
YAEGASHI HIDETAMI
JP·4 granted patents·2 pending applications·10 citations·filing 2009–2012
Top patents by PatentIndex Score
6 records- 0175US8283253B2Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatusYAEGASHI HIDETAMI·Filed 2009·Granted Oct 9, 2012·4 cites·12 claims
- 0274US8551691B2Method of forming mask patternYAEGASHI HIDETAMI·Filed 2012·Granted Oct 8, 2013·3 cites·10 claims
- 0371US8273661B2Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatusYAEGASHI HIDETAMI·Filed 2009·Granted Sep 25, 2012·3 cites·12 claims
- 0449US2012305183A1Semiconductor device manufacturing apparatusYAEGASHI HIDETAMI·Filed 2012·Application pending·0 cites
- 0548US2012312472A1Semiconductor device manufacturing apparatusYAEGASHI HIDETAMI·Filed 2012·Application pending·0 cites
- 0641US8263320B2Method, program and system for processing substrateYAEGASHI HIDETAMI·Filed 2010·Granted Sep 11, 2012·0 cites·15 claims
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