Assignee
WU LIQI
US·0 granted patents·3 pending applications·0 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0140US2014127912A1Plasma process etch-to-deposition ratio modulation via ground surface designWU LIQI·Filed 2012·Application pending·0 cites
- 0239US2012228125A1Creation of magnetic field (vector potential) well for improved plasma deposition and resputtering uniformityWU LIQI·Filed 2012·Application pending·0 cites
- 0338US2012070589A1Creation of magnetic field (vector potential) well for improved plasma deposition and resputtering uniformityWU LIQI·Filed 2011·Application pending·0 cites
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