Individual holder
WILLWERTH MICHAEL D
US·4 granted patents·1 pending application·39 citations·filing 2009–2014
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0194US8270141B2Electrostatic chuck with reduced arcingWILLWERTH MICHAEL D·Filed 2010·Granted Sep 18, 2012·26 cites·20 claims
- 0284US8419893B2Shielded lid heater assemblyWILLWERTH MICHAEL D·Filed 2009·Granted Apr 16, 2013·7 cites·15 claims
- 0380US8757603B2Low force substrate liftWILLWERTH MICHAEL D·Filed 2010·Granted Jun 24, 2014·5 cites·19 claims
- 0467US9362148B2Shielded lid heater assemblyWILLWERTH MICHAEL D·Filed 2013·Granted Jun 7, 2016·1 cites·15 claims
- 0542US2015221481A1Electrostatic chuck with magnetic cathode liner for critical dimension (cd) tuningWILLWERTH MICHAEL D·Filed 2014·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →