Assignee
WARNAAR PATRICK
NL·3 granted patents·1 pending application·8 citations·filing 2009–2012
Technology mixG03F4
Top patents by PatentIndex Score
4 records- 0187US9069264B2Metrology method and apparatus, and device manufacturing methodWARNAAR PATRICK·Filed 2012·Granted Jun 30, 2015·8 cites·19 claims
- 0256US8130366B2Method for coarse wafer alignment in a lithographic apparatusWARNAAR PATRICK·Filed 2009·Granted Mar 6, 2012·0 cites·15 claims
- 0352US8080462B2Mark structure for coarse wafer alignment and method for manufacturing such a mark structureWARNAAR PATRICK·Filed 2011·Granted Dec 20, 2011·0 cites·8 claims
- 0450US2012127452A1Method for coarse wafer alignment in a lithographic apparatusWARNAAR PATRICK·Filed 2012·Application pending·0 cites
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