Assignee
VISTEC LITHOGRAPHY INC
US·1 granted patent·4 pending applications·2 citations·filing 2007–2008
Top patents by PatentIndex Score
5 records- 0162US8006950B2Apparatus supportVISTEC LITHOGRAPHY INC·Filed 2008·Granted Aug 30, 2011·2 cites·17 claims
- 0244US2010044546A1Apparatus support structureVISTEC LITHOGRAPHY INC·Filed 2008·Application pending·0 cites
- 0341US2009231594A1Component mounting in movement-sensitive equipmentVISTEC LITHOGRAPHY INC·Filed 2007·Application pending·0 cites
- 0436US2010096567A1Reduction in stage movement reaction force in an electron beam lithography machineVISTEC LITHOGRAPHY INC·Filed 2007·Application pending·0 cites
- 0527US2010264335A1Pattern writing on a rotating substrateVISTEC LITHOGRAPHY INC·Filed 2008·Application pending·0 cites
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