Assignee
TSUJI TOSHIHIKO
JP·1 granted patent·2 pending applications·1 citations·filing 2005–2011
Top patents by PatentIndex Score
3 records- 0161US8891062B2Illumination optical system, exposure apparatus, and method of manufacturing deviceTSUJI TOSHIHIKO·Filed 2011·Granted Nov 18, 2014·1 cites·9 claims
- 0235US2005236584A1Exposure method and apparatusTSUJI TOSHIHIKO·Filed 2005·Application pending·0 cites
- 0330US2013169788A1Microscope, image acquisition apparatus, and image acquisition systemTSUJI TOSHIHIKO·Filed 2011·Application pending·0 cites
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