Assignee
TOYODA MITSUNORI
JP·2 granted patents·1 pending application·6 citations·filing 2011–2017
Top patents by PatentIndex Score
3 records- 0190US9164209B2Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thicknesses to rotate linear polarization directionTOYODA MITSUNORI·Filed 2011·Granted Oct 20, 2015·5 cites·29 claims
- 0275US10281632B2Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization directionTOYODA MITSUNORI·Filed 2011·Granted May 7, 2019·1 cites·30 claims
- 0364US2017351100A1Beam transforming optical system, illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thickness to rotate linear polarization directionTOYODA MITSUNORI·Filed 2017·Application pending·0 cites
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