Assignee
TOUYA TAKANAO
JP·3 granted patents·22 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0189US9036896B2Inspection system and method for inspecting line width and/or positional errors of a patternTOUYA TAKANAO·Filed 2011·Granted May 19, 2015·11 cites·10 claims
- 0282US8067753B2Electron beam writing apparatus and methodTOUYA TAKANAO·Filed 2009·Granted Nov 29, 2011·7 cites·15 claims
- 0379US8610096B2Charged particle beam writing apparatus and methodTOUYA TAKANAO·Filed 2011·Granted Dec 17, 2013·4 cites·18 claims
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