Assignee
TASMIT INC
JP10 patents
Top patents by PatentIndex Score
US11380513B2Jul 5, 2022
Autofocus method for a scanning electron microscope
TASMIT INC3 citations73
US10614999B2Apr 7, 2020
Image generation method
TASMIT INC3 citations69
US10802073B2Oct 13, 2020
Pattern defect detection method
TASMIT INC4 citations64
US12243237B2Mar 4, 2025
Pattern-edge detection method, pattern-edge detection apparatus, and storage medium storing program for causing a computer to perform pattern-edge detection
TASMIT INC0 citations61
US11322332B2May 3, 2022
Apparatus and method for measuring energy spectrum of backscattered electrons
TASMIT INC0 citations60
US11468555B2Oct 11, 2022
Method and apparatus for generating a correction line indicating relationship between deviation of an edge of a wafer pattern from an edge of a reference pattern and space width of the reference pattern, and a computer-readable recording medium
TASMIT INC0 citations51
US12387341B2Aug 12, 2025
Pattern matching method
TASMIT INC0 citations48
US12347642B2Jul 1, 2025
Scanning electron microscope
TASMIT INC0 citations47
US12555220B2Feb 17, 2026
Pattern defect detection method
TASMIT INC0 citations41
US11436736B2Sep 6, 2022
Pattern edge detection method
TASMIT INC0 citations30