Assignee
TANDOU TAKUMI
JP·6 granted patents·3 pending applications·18 citations·filing 2007–2012
Top patents by PatentIndex Score
9 records- 0188US8955579B2Plasma processing apparatus and plasma processing methodTANDOU TAKUMI·Filed 2011·Granted Feb 17, 2015·8 cites·5 claims
- 0276US8833089B2Plasma processing apparatus and maintenance method thereforTANDOU TAKUMI·Filed 2009·Granted Sep 16, 2014·4 cites·17 claims
- 0371US9070724B2Vacuum processing apparatus and plasma processing apparatus with temperature control function for wafer stageTANDOU TAKUMI·Filed 2012·Granted Jun 30, 2015·2 cites·2 claims
- 0464US8747763B2Plasma sterilization apparatusTANDOU TAKUMI·Filed 2012·Granted Jun 10, 2014·2 cites·7 claims
- 0561US8426764B2Plasma processing apparatus and plasma processing methodTANDOU TAKUMI·Filed 2008·Granted Apr 23, 2013·1 cites·9 claims
- 0660US9368377B2Plasma processing apparatusTANDOU TAKUMI·Filed 2007·Granted Jun 14, 2016·1 cites·7 claims
- 0750US2008178608A1Plasma processing apparatus and plasma processing methodTANDOU TAKUMI·Filed 2007·Application pending·0 cites
- 0848US2010126666A1Plasma processing apparatusTANDOU TAKUMI·Filed 2009·Application pending·0 cites
- 0938US2013202479A1Plasma sterilizer, plasma sterilization system, and plasma sterilization methodTANDOU TAKUMI·Filed 2010·Application pending·0 cites
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