Assignee
TAMAMUSHI SHUICHI
JP·4 granted patents·27 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0185US8277603B2Move mechanism for moving target object and charged particle beam writing apparatusTAMAMUSHI SHUICHI·Filed 2007·Granted Oct 2, 2012·11 cites·11 claims
- 0282US8306310B2Apparatus and method for pattern inspectionTAMAMUSHI SHUICHI·Filed 2009·Granted Nov 6, 2012·5 cites·10 claims
- 0378US8452074B2Apparatus and method for pattern inspectionTAMAMUSHI SHUICHI·Filed 2012·Granted May 28, 2013·4 cites·10 claims
- 0468US8229207B2Mask inspection apparatus and mask inspection methodTAMAMUSHI SHUICHI·Filed 2009·Granted Jul 24, 2012·7 cites·9 claims
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