Assignee
SWISSLITHO AG
CH·2 granted patents·0 citations·filing 2014–2014
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0146US9921486B2Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capabilitySWISSLITHO AG·Filed 2014·Granted Mar 20, 2018·0 cites·25 claims
- 0235US10209630B2Scanning probe nanolithography system and methodSWISSLITHO AG·Filed 2014·Granted Feb 19, 2019·0 cites·16 claims
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