Assignee
STRASBAUGH INC
US5 patents
Top patents by PatentIndex Score
US6146242ANov 14, 2000
Optical view port for chemical mechanical planarization endpoint detection
STRASBAUGH INC118 citations97
US6131589AOct 17, 2000
Accurate positioning of a wafer
STRASBAUGH INC36 citations94
US6183341B1Feb 6, 2001
Slurry pump control system
STRASBAUGH INC38 citations92
US6254155B1Jul 3, 2001
Apparatus and method for reliably releasing wet, thin wafers
STRASBAUGH INC39 citations90
US7083497B2Aug 1, 2006
Polishing pad with built-in optical sensor
STRASBAUGH INC9 citations70