Individual holder
STOWELL MICHAEL W
US·4 granted patents·11 pending applications·16 citations·filing 2005–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
15 records- 0186US9018110B2Apparatus and methods for microwave processing of semiconductor substratesSTOWELL MICHAEL W·Filed 2012·Granted Apr 28, 2015·7 cites·18 claims
- 0286US8679594B2Index modified coating on polymer substrateSTOWELL MICHAEL W·Filed 2011·Granted Mar 25, 2014·3 cites·4 claims
- 0382US8057649B2Microwave rotatable sputtering depositionSTOWELL MICHAEL W·Filed 2008·Granted Nov 15, 2011·6 cites·16 claims
- 0460US2008286495A1System and method for power function ramping of split antenna pecvd discharge sourcesSTOWELL MICHAEL W·Filed 2007·Application pending·0 cites
- 0558US2007098893A1Coated substrate created by systems and methods for modulation of power and power related functions of PECVD discharge sources to achieve new film propertiesSTOWELL MICHAEL W·Filed 2006·Application pending·0 cites
- 0655US2010330300A1System and method for pre-ionization of surface wave launched plasma discharge sourcesSTOWELL MICHAEL W·Filed 2008·Application pending·0 cites
- 0753US2010098881A1System and Method for Chemical Vapor Deposition Process ControlSTOWELL MICHAEL W·Filed 2007·Application pending·0 cites
- 0851US2007095281A1System and method for power function ramping of microwave liner discharge sourcesSTOWELL MICHAEL W·Filed 2005·Application pending·0 cites
- 0951US2007190808A1Low-k dielectric layers for large substratesSTOWELL MICHAEL W·Filed 2006·Application pending·0 cites
- 1051US2008113108A1System and method for control of electromagnetic radiation in pecvd discharge processesSTOWELL MICHAEL W·Filed 2006·Application pending·0 cites
- 1149US2006278521A1System and method for controlling ion density and energy using modulated power signalsSTOWELL MICHAEL W·Filed 2005·Application pending·0 cites
- 1247US2008113107A1System and method for containment shielding during pecvd deposition processesSTOWELL MICHAEL W·Filed 2006·Application pending·0 cites
- 1347US2008110752A1System and method for high-energy sputtering using return conductorsSTOWELL MICHAEL W·Filed 2006·Application pending·0 cites
- 1444US8536955B2Integrated microwave waveguide block with tapered impedance transition sectionsSTOWELL MICHAEL W·Filed 2008·Granted Sep 17, 2013·0 cites·11 claims
- 1544US2006278524A1System and method for modulating power signals to control sputteringSTOWELL MICHAEL W·Filed 2005·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →