Assignee
STANDIFORD KEITH
US·2 granted patents·13 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0181US8063365B1Non-shot-noise-limited source for electron beam lithography or inspectionSTANDIFORD KEITH·Filed 2008·Granted Nov 22, 2011·8 cites·11 claims
- 0276US9040942B1Electron beam lithography with linear column array and rotary stageSTANDIFORD KEITH·Filed 2008·Granted May 26, 2015·5 cites·11 claims
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