Assignee
SPOHN RONALD F
US·7 granted patents·17 citations·filing 2008–2013
Top patents by PatentIndex Score
7 records- 0194US8114479B2Diptube apparatus and delivery methodSPOHN RONALD F·Filed 2011·Granted Feb 14, 2012·14 cites·5 claims
- 0275US8524321B2Reagent dispensing apparatus and delivery methodSPOHN RONALD F·Filed 2008·Granted Sep 3, 2013·1 cites·23 claims
- 0369US8518483B2Diptube apparatus and method for delivering vapor phase reagent to a deposition chamberSPOHN RONALD F·Filed 2008·Granted Aug 27, 2013·2 cites·30 claims
- 0465US8518484B2Bubbler apparatus and delivery methodSPOHN RONALD F·Filed 2008·Granted Aug 27, 2013·0 cites·25 claims
- 0564US8518482B2Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamberSPOHN RONALD F·Filed 2008·Granted Aug 27, 2013·0 cites·30 claims
- 0664US8512635B2Apparatus and method for delivering vapor phase reagent to a deposition chamberSPOHN RONALD F·Filed 2008·Granted Aug 20, 2013·0 cites·28 claims
- 0752US9829152B2Cylinder preparation for maintaining stability of stored materialsSPOHN RONALD F·Filed 2013·Granted Nov 28, 2017·0 cites·8 claims
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