Assignee
SOONHAN ENG CORP
KR·4 granted patents·1 pending application·2 citations·filing 2008–2015
Top patents by PatentIndex Score
5 records- 0151US9417633B2System for compensating dynamic and thermal deformity errors of linear motion single-plane gantry stage in real time, stage apparatus, manufacturing thereof, and measuring and inspection equipmentSOONHAN ENG CORP·Filed 2014·Granted Aug 16, 2016·2 cites·13 claims
- 0241US7821632B2Sample traveling stage with flexure mechanism module to absorb the deformation of the slideSOONHAN ENG CORP·Filed 2008·Granted Oct 26, 2010·0 cites·9 claims
- 0340US9429959B2Control apparatus for a linear motion stage, and linear motion systemSOONHAN ENG CORP·Filed 2014·Granted Aug 30, 2016·0 cites·4 claims
- 0430US9546885B2Encoder aligning apparatusSOONHAN ENG CORP·Filed 2015·Granted Jan 17, 2017·0 cites·4 claims
- 0519US2015292882A1System for measuring orthogonality of a stage and method for positioning stage home using sameSOONHAN ENG CORP·Filed 2015·Application pending·0 cites
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