Assignee
SONG JEE-YUN
KR·2 granted patents·23 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0191US9018776B2Hardmask composition including aromatic ring-containing compound, method of forming patterns, and semiconductor integrated circuit device including the patternsSONG JEE-YUN·Filed 2011·Granted Apr 28, 2015·20 cites·12 claims
- 0276US9116429B2Resist underlayer polymer, resist underlayer composition including the same, and method of patterning using the sameSONG JEE-YUN·Filed 2010·Granted Aug 25, 2015·3 cites·18 claims
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