Assignee
SOGARD MICHAEL R
US·4 granted patents·1 pending application·6 citations·filing 2010–2011
Top patents by PatentIndex Score
5 records- 0177US8767174B2Temperature-controlled holding devices for planar articlesSOGARD MICHAEL R·Filed 2011·Granted Jul 1, 2014·4 cites·44 claims
- 0263US10054754B2Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchangerSOGARD MICHAEL R·Filed 2010·Granted Aug 21, 2018·1 cites·101 claims
- 0362US8593779B2Hybrid electrostatic chuckSOGARD MICHAEL R·Filed 2010·Granted Nov 26, 2013·1 cites·18 claims
- 0444US8717542B2Fluid gauge with multiple reference gapsSOGARD MICHAEL R·Filed 2010·Granted May 6, 2014·0 cites·27 claims
- 0540US2011069291A1Physical sensor for autofocus systemSOGARD MICHAEL R·Filed 2010·Application pending·0 cites
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