Assignee
SIX STEPHAN
DE·3 granted patents·16 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0182US8279402B2Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the sameSIX STEPHAN·Filed 2009·Granted Oct 2, 2012·11 cites·27 claims
- 0277US8564925B2Wafer chuck for EUV lithographySIX STEPHAN·Filed 2011·Granted Oct 22, 2013·3 cites·28 claims
- 0370US8934079B2Optical imaging with reduced immersion liquid evaporation effectsSIX STEPHAN·Filed 2011·Granted Jan 13, 2015·2 cites·23 claims
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