Assignee
SINGULUS TECH AG
DE·10 granted patents·22 pending applications·16 citations·filing 2014–2025
Top patents by PatentIndex Score
32 records- 0188US9842755B2Method and system for naturally oxidizing a substrateSINGULUS TECH AG·Filed 2014·Granted Dec 12, 2017·12 cites·6 claims
- 0274US11597998B2Vacuum lock and method for transferring a substrate carrierSINGULUS TECH AG·Filed 2018·Granted Mar 7, 2023·1 cites·18 claims
- 0368US2026090316A1Apparatus and method for treating wafers using guiding elementsSINGULUS TECH AG·Filed 2025·Application pending·0 cites
- 0468US2026090311A1Apparatus and method for treating wafers using separating elementsSINGULUS TECH AG·Filed 2025·Application pending·0 cites
- 0567US9845202B2Method and device for stringing substrates together in coating systemsSINGULUS TECH AG·Filed 2015·Granted Dec 19, 2017·2 cites·7 claims
- 0663US2025207238A1Coating module with improved cathode arrangementSINGULUS TECH AG·Filed 2023·Application pending·0 cites
- 0761US2019177851A1System and method for gas phase depositionSINGULUS TECH AG·Filed 2017·Application pending·0 cites
- 0861US2025188589A1Coating source having a refill deviceSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 0958US11062929B2Device and method for treating substrates using a support roller having a porous materialSINGULUS TECH AG·Filed 2018·Granted Jul 13, 2021·1 cites·19 claims
- 1057US2025003052A1Coating source, coating installation and method for coating substratesSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 1154US11519065B2Method of coating substratesSINGULUS TECH AG·Filed 2019·Granted Dec 6, 2022·0 cites·19 claims
- 1254US2025290192A1Coating plant and method for target replacementSINGULUS TECH AG·Filed 2023·Application pending·0 cites
- 1354US2025075311A1Coating chamber with distance detection for the substratesSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 1452US2024271871A1Monitoring a flame treatment deviceSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 1551US2019211446A1A Non-Contact Substrate Carrier for Simultaneous Rotation and Levitation of a SubstrateSINGULUS TECH AG·Filed 2017·Application pending·0 cites
- 1649US12196260B2Treatment machine, drive unit for a treatment machine and use of the treatment machineSINGULUS TECH AG·Filed 2020·Granted Jan 14, 2025·0 cites·23 claims
- 1749US2025001450A1Substrate supportSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 1849US2024339354A1Spacer device for a heating system for heating large-area substrates, heating system, and heating methodSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 1946US2022336188A1Plasma treatment system and plasma treatment methodSINGULUS TECH AG·Filed 2020·Application pending·0 cites
- 2046US2024286235A1Substrate carrierSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 2145US2022348422A1Substrate carrier with centering functionSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 2245US2025040257A1Generation of textured surfaces, manufacturing of tandem solar cells, and tandem solar cellSINGULUS TECH AG·Filed 2024·Application pending·0 cites
- 2344US2020283901A1System and method for gas phase depositionSINGULUS TECH AG·Filed 2016·Application pending·0 cites
- 2444US2023260808A1Heating system and method for heating large-surface substratesSINGULUS TECH AG·Filed 2021·Application pending·0 cites
- 2542US12243730B2Slit diaphragmSINGULUS TECH AG·Filed 2021·Granted Mar 4, 2025·0 cites·15 claims
- 2642US12188122B2Process and device for providing vaporSINGULUS TECH AG·Filed 2019·Granted Jan 7, 2025·0 cites·23 claims
- 2742US10167548B2Continuous systemSINGULUS TECH AG·Filed 2015·Granted Jan 1, 2019·0 cites·15 claims
- 2837US2025015223A1Method and wet bench for the in-line processing of solar-cell substratesSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 2936US2021335585A1Continuous flow system and method for coating substratesSINGULUS TECH AG·Filed 2019·Application pending·0 cites
- 3036US2024339554A1Process for manufacturing a starting material for a silicon solar cell having passivated contactsSINGULUS TECH AG·Filed 2022·Application pending·0 cites
- 3135US10902758B2IlluminantSINGULUS TECH AG·Filed 2018·Granted Jan 26, 2021·0 cites·23 claims
- 3230US2023246118A1Method and system for the production of a starting material for a silicon solar cell with passivated contactsSINGULUS TECH AG·Filed 2021·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →