Assignee
SHIRAISHI NAOMASA
JP·4 granted patents·2 pending applications·10 citations·filing 2006–2009
Top patents by PatentIndex Score
6 records- 0185US9140993B2Illumination optical apparatus and projection exposure apparatusSHIRAISHI NAOMASA·Filed 2008·Granted Sep 22, 2015·4 cites·25 claims
- 0281US9244359B2Illumination optical apparatus and projection exposure apparatusSHIRAISHI NAOMASA·Filed 2009·Granted Jan 26, 2016·3 cites·34 claims
- 0381US9140992B2Illumination optical apparatus and projection exposure apparatusSHIRAISHI NAOMASA·Filed 2006·Granted Sep 22, 2015·3 cites·18 claims
- 0448US8431328B2Exposure method, method for manufacturing flat panel display substrate, and exposure apparatusSHIRAISHI NAOMASA·Filed 2008·Granted Apr 30, 2013·0 cites·20 claims
- 0546US2008299499A1Exposure method, method of manufacturing plate for flat panel display, and exposure apparatusSHIRAISHI NAOMASA·Filed 2008·Application pending·0 cites
- 0642US2009068597A1Exposure method and apparatus, and electronic device manufacturing methodSHIRAISHI NAOMASA·Filed 2006·Application pending·0 cites
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