Assignee
SHIOBARA EISHI
JP·4 granted patents·2 pending applications·32 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0196US8883405B2Method for forming patternSHIOBARA EISHI·Filed 2012·Granted Nov 11, 2014·23 cites·14 claims
- 0280US8187797B2Method of manufacturing semiconductor deviceSHIOBARA EISHI·Filed 2009·Granted May 29, 2012·7 cites·8 claims
- 0363US8198005B2Method of forming resist patternSHIOBARA EISHI·Filed 2009·Granted Jun 12, 2012·1 cites·18 claims
- 0460US8329385B2Method of manufacturing a semiconductor deviceSHIOBARA EISHI·Filed 2009·Granted Dec 11, 2012·1 cites·17 claims
- 0550US2007266936A1Substrate processing apparatus and methodSHIOBARA EISHI·Filed 2007·Application pending·0 cites
- 0649US2008073286A1Waste liquid processing method in semiconductor manufacturing process and substrate processing apparatusSHIOBARA EISHI·Filed 2007·Application pending·0 cites
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