Assignee
SHIH HUI-SHEN
TW·8 granted patents·8 pending applications·14 citations·filing 2005–2011
Top patents by PatentIndex Score
16 records- 0184US8134192B2Integrated structure of MEMS device and CMOS image sensor deviceSHIH HUI-SHEN·Filed 2010·Granted Mar 13, 2012·3 cites·6 claims
- 0282US8071412B2Method of fabricating micro-electromechanical system microphone structureSHIH HUI-SHEN·Filed 2010·Granted Dec 6, 2011·3 cites·11 claims
- 0378US8072036B2Micro-electromechanical system microphone structureSHIH HUI-SHEN·Filed 2010·Granted Dec 6, 2011·3 cites·12 claims
- 0475US8101987B2Semiconductor device and method of fabricating the sameSHIH HUI-SHEN·Filed 2010·Granted Jan 24, 2012·2 cites·6 claims
- 0566US8134215B2MEMS diaphragmSHIH HUI-SHEN·Filed 2008·Granted Mar 13, 2012·3 cites·7 claims
- 0652US2010144156A1Method to integrate micro electro mechanical system and cmos image sensorSHIH HUI-SHEN·Filed 2008·Application pending·0 cites
- 0751US8492857B2MEMS diaphragmSHIH HUI-SHEN·Filed 2011·Granted Jul 23, 2013·0 cites·8 claims
- 0851US8390085B2MEMS diaphragmSHIH HUI-SHEN·Filed 2011·Granted Mar 5, 2013·0 cites·6 claims
- 0950US2012043199A9Fluid-confining apparatus and method of operating the sameSHIH HUI-SHEN·Filed 2008·Application pending·0 cites
- 1049US2009117835A1Expandable polishing platen deviceSHIH HUI-SHEN·Filed 2007·Application pending·0 cites
- 1148US8674463B2Multifunction MEMS element and integrated method for making MOS and multifunction MEMSSHIH HUI-SHEN·Filed 2009·Granted Mar 18, 2014·0 cites·14 claims
- 1247US2010068832A1Method for the protection of information in multi-project wafersSHIH HUI-SHEN·Filed 2008·Application pending·0 cites
- 1344US2008305609A1Method for forming a seamless shallow trench isolationSHIH HUI-SHEN·Filed 2007·Application pending·0 cites
- 1442US2007144892A1Method for forming metal film or stacked layer including metal film with reduced surface roughnessSHIH HUI-SHEN·Filed 2005·Application pending·0 cites
- 1542US2009123877A1Method for forming an opening of nano-meter scaleSHIH HUI-SHEN·Filed 2007·Application pending·0 cites
- 1641US2007072356A1Method for reducing positive charges accumulated on chips during ion implantationSHIH HUI-SHEN·Filed 2005·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →