Assignee
SHIBUYA AKINORI
JP·1 granted patent·4 pending applications·5 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0182US8541160B2Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the sameSHIBUYA AKINORI·Filed 2011·Granted Sep 24, 2013·5 cites·23 claims
- 0247US2012219910A1Photosensitive composition and pattern forming method using sameSHIBUYA AKINORI·Filed 2012·Application pending·0 cites
- 0335US2012207978A1Actinic-ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the same compositionSHIBUYA AKINORI·Filed 2012·Application pending·0 cites
- 0432US2012129100A1Actinic ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the sameSHIBUYA AKINORI·Filed 2010·Application pending·0 cites
- 0531US2012135348A1Actinic-ray-sensitive or radiation-sensitive resin composition, actinic-ray-sensitive or radiation-sensitive film, and pattern forming methodSHIBUYA AKINORI·Filed 2011·Application pending·0 cites
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