Assignee
SHAO SHOUQIAN
US·3 granted patents·2 pending applications·4 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0182US8974649B2Combinatorial RF bias method for PVDSHAO SHOUQIAN·Filed 2011·Granted Mar 10, 2015·3 cites·17 claims
- 0255US8925481B2Systems and methods for measuring, monitoring and controlling ozone concentrationSHAO SHOUQIAN·Filed 2011·Granted Jan 6, 2015·1 cites·15 claims
- 0349US8851010B2Systems and methods for measuring, monitoring and controlling ozone concentrationSHAO SHOUQIAN·Filed 2011·Granted Oct 7, 2014·0 cites·12 claims
- 0437US2013270103A1Method Of Enabling And Controlling Ozone Concentration And FlowSHAO SHOUQIAN·Filed 2012·Application pending·0 cites
- 0534US2013153536A1Combinatorial processing using a remote plasma sourceSHAO SHOUQIAN·Filed 2011·Application pending·0 cites
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