Assignee
SEZ AG
AT·13 granted patents·5 pending applications·359 citations·filing 1999–2007
Top patents by PatentIndex Score
18 records- 0192US6858092B2Device and process for liquid treatment of wafer-shaped articlesSEZ AG·Filed 2002·Granted Feb 22, 2005·63 cites·38 claims
- 0290US6536454B2Device for treating a disc-shaped objectSEZ AG·Filed 2001·Granted Mar 25, 2003·74 cites·12 claims
- 0384US7007702B2Device and process for liquid treatment of wafer-shaped articlesSEZ AG·Filed 2003·Granted Mar 7, 2006·25 cites·10 claims
- 0483US7267129B2Device and process for liquid treatment of wafer-shaped articlesSEZ AG·Filed 2006·Granted Sep 11, 2007·7 cites·18 claims
- 0582US6494221B1Device for wet etching an edge of a semiconductor diskSEZ AG·Filed 1999·Granted Dec 17, 2002·105 cites·6 claims
- 0681US7057973B2Method and device for measuring cavitationSEZ AG·Filed 2005·Granted Jun 6, 2006·6 cites·23 claims
- 0778US7270510B2Device and method for transporting wafer-shaped articlesSEZ AG·Filed 2003·Granted Sep 18, 2007·31 cites·4 claims
- 0876US7172674B2Device for liquid treatment of wafer-shaped articlesSEZ AG·Filed 2001·Granted Feb 6, 2007·17 cites·32 claims
- 0966US7279116B2Method for the wet treatment of disk-like objectsSEZ AG·Filed 2003·Granted Oct 9, 2007·15 cites·15 claims
- 1064US7122084B2Device for liquid treatment of disk-shaped objectsSEZ AG·Filed 2003·Granted Oct 17, 2006·10 cites·10 claims
- 1152US7052577B2Annular receptacle for a rotating carrierSEZ AG·Filed 2002·Granted May 30, 2006·4 cites·14 claims
- 1245US7179753B2Process for planarizing substrates of semiconductor technologySEZ AG·Filed 2002·Granted Feb 20, 2007·2 cites·12 claims
- 1344US2009235952A1Device and method for wet treating plate-like substratesSEZ AG·Filed 2007·Application pending·0 cites
- 1443US2010206338A1Device and method for removing liquid from a surface of a disc-like articleSEZ AG·Filed 2007·Application pending·0 cites
- 1542US2007295367A1Apparatus and Method For Wet Treatment of WafersSEZ AG·Filed 2005·Application pending·0 cites
- 1640US7078340B2Metal deposit processSEZ AG·Filed 2001·Granted Jul 18, 2006·0 cites·35 claims
- 1739US2008011330A1Apparatus And Method For Drying Disk-Shaped SubstratesSEZ AG·Filed 2005·Application pending·0 cites
- 1835US2007158307A1Method for selective etchingSEZ AG·Filed 2005·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →