Assignee
SEO JUNG-HUN
0 granted patents·9 pending applications·0 citations·filing 2004–2010
Top patents by PatentIndex Score
9 records- 0146US2006096541A1Apparatus and method of forming a layer on a semiconductor substrateSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0246US2006045970A1ALD thin film deposition apparatus and thin film deposition method using sameSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0343US2011053329A1Semiconductor device including a gate electrode of lower electrial resistance and method of manufacturing the sameSEO JUNG-HUN·Filed 2010·Application pending·0 cites
- 0441US2006054087A1Process chamber for manufacturing seminconductor devicesSEO JUNG-HUN·Filed 2004·Application pending·0 cites
- 0541US2006021578A1Chemical vapor deposition apparatusSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0641US2006024964A1Method and apparatus of forming thin film using atomic layer depositionSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0740US2007042132A1Method of forming plasma and method of forming a layer using the sameSEO JUNG-HUN·Filed 2006·Application pending·0 cites
- 0839US2006137607A1Combination of showerhead and temperature control means for controlling the temperature of the showerhead, and deposition apparatus having the sameSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0938US2006128127A1Method of depositing a metal compound layer and apparatus for depositing a metal compound layerSEO JUNG-HUN·Filed 2005·Application pending·0 cites
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